Protective coatings for aluminum mirrors and methods of forming the same
AssigneeCorning Incorporated
InventorsDonald Erwin Allen, Narendra Shamkant Borgharkar, Ming-Huang Huang, Hoon Kim, Jue Wang
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Abstract
According to at least one feature of the present disclosure, a method of forming an optical element, includes: Depositing an aluminum layer atop a glass substrate via a physical deposition process; depositing a first fluorine containing layer atop the aluminum layer via a physical deposition process; depositing a second fluorine containing layer atop the first fluorine containing layer via a physical deposition process; and depositing a third fluorine containing layer atop the first fluorine containing layer via an atomic layer deposition process.
Claims21
A method of forming an optical element, comprising:
- depositing an aluminum layer atop a glass substrate via a physical deposition process;
- depositing a first fluorine containing layer atop the aluminum layer via a physical deposition process;
- depositing a second fluorine containing layer atop the first fluorine containing layer via a physical deposition process;
- and
- depositing a third fluorine containing layer atop the first fluorine containing layer via an atomic layer deposition process.
A method of forming an optical element, comprising:
- depositing an aluminum layer atop a glass substrate via a physical deposition process;
- removing aluminum oxide (Al2O3) from a surface of the aluminum layer via an atomic layer etching process;
- depositing a first fluorine containing layer atop the aluminum layer via an atomic layer deposition process without exposing the glass substrate to atmospheric air after etching the aluminum layer;
- depositing a second fluorine containing layer atop the first fluorine containing layer via an atomic layer deposition process;
- and
- depositing a third fluorine containing layer atop the first fluorine containing layer via an atomic layer deposition process.
An optical element, comprising:
- a glass substrate;
- an aluminum layer atop the glass substrate;
- a first fluorine containing layer atop the aluminum layer;
- a second fluorine containing layer atop the first fluorine containing layer;
- and
- a third fluorine containing layer atop the first fluorine containing layer.
Dependencies are inferred from the claim text.