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US 2023/0167545 A1Published application
Stabilization of carbon deposition precursors like c2h2
AssigneeLam Research Corporation
InventorsKapu Sirish Reddy, Adrien LaVoie
Life of this patent
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Abstract
The present disclosure relates to compositions including a mixture or solution of acetylene and a stabilizer. In particular embodiments, the composition is a stabilized composition including pressurized acetylene.
Claims57
A composition comprising a mixture or solution of:
- acetylene;
- and
- a stabilizer comprising an amide having a vapor pressure of about 3 Torr or lower at 25° C., an amine, an imine, a nitrile having a vapor pressure of about 80 Torr or lower at 25° C., a nitrogen-containing saturated heterocyclic ring compound, a nitrogenwavs1-containing unsaturated heterocyclic ring compound, an unsaturated linear or branched hydrocarbon, an unsaturated ring hydrocarbon having a vapor pressure of about 5 Torr or lower at 25° C., a non-aromatic unsaturated ring hydrocarbon, an ether, a ketone, an aldehyde, an ester having a vapor pressure of about 90 Torr or lower at 25° C., an ionic liquid, a carbene, a silylene, a mixed electron donor compound comprising a pi bond and an atom having a lone electron pair, a phosphorus-containing compound in which the phosphorus atom has a lone electron pair, or a sulfur-containing compound in which the sulfur atom has a lone electron pair,
- wherein the ketone has a vapor pressure of about 30 Torr or lower at 25° C.;
- or wherein the ketone is selected from the group consisting of acetylacetone (acac), 2-butanone, 2-pentanone, 2-hexanone, 2-heptanone, 2-octanone, 2-nonanone, 2-decanone, 3-pentanone, 3-heptanone, 3-octanone, 3-nonanone, 3-decanone, and aromatic ketones comprising acetophenone, 3-hydroxyacetophenone, cyclohexanone, benzophenone, butyrophenone, acetylpyrazine, 2-acetyl pyridine, acrylophenone, capillin, dibenzoylmethane, indenone, 1-indanone, paroxypropione, phenylglyoxal, piceol, propriophenone, pyridoxal, 2,4,6-trihydroxyacetophenone, 2,4,5-trihydroxyacetophenone, or valerophenone.
2 more elements
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14-16. (canceled)
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34-35. (canceled)
A stabilized composition comprising:
- a pressurized acetylene;
- and
- a stabilizer is a stabilizer comprising a nitrogen atom, wherein the stabilizer is not dimethylformamide, not dimethylacetamide, not N-methyl-2-pyrrolidone, and not acetonitrile;
- a heterocycle, wherein the stabilizer is not 1,3-dioxolane, not 1,4-dioxane, and not N-methyl-2-pyrrolidone;
- a substituted aromatic hydrocarbon having one or more substitutions, wherein the one or more substitutions are selected from the group consisting of halo, amine, and optionally substituted C2-8 alkyl;
- an optionally substituted alkene or an optionally substituted alkyne;
- an aldehyde or an ether, wherein the stabilizer is not 1,3-dioxolane and not 1,4-dioxane;
- an ester selected from the group consisting of a cyclic ester, a glycol based ester, a lactate, a carbonate ester, an amino ester, and a diester;
- a cyclic ketone, an aryl ketone, a dione, or a trione;
- a carbene or a carbene derivative;
- a metal compound, an onium compound, an organosulfur compound, or an organophosphorus compound, wherein the stabilizer is not dimethylsulfoxide;
- or an ionic liquid.
9 more elements
44-45. (canceled)
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51-52. (canceled)
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58-60. (canceled)
62-64. (canceled)
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Dependencies are inferred from the claim text.