Electronic structure and method of manufacturing complex film

A method of manufacturing a complex film, comprising:

• forming a substrate having a first surface;
• forming a support layer having a third surface on the first surface;
• forming a complex film, including a functional section that has an electronic function and a protective member that protects the functional section and having a second surface formed on the third surface’s side, on the support layer;
• and
• removing part of the support layer and thereby making area of the third surface, in contact with the complex film in remaining part of the support layer, smaller than area of the second surface,
• wherein one of part of the complex film forming the second surface of the protective member and part of the support layer forming the third surface contains organic material as its principal component and the other contains inorganic material as its principal component.