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US 2023/0156899 A1Published application
Irradiator and plasma apparatus
AssigneeSekisui Chemical Co., Ltd.
InventorsTatsuya MATSUO, Yuu NAGAHARA, Takaya OOSHITA, Naomichi SAITOU
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Abstract
An irradiator includes: a piezoelectric transformer accommodated in a housing; a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer; and an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma. At least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening.
Claims8
An irradiator comprising:
- a piezoelectric transformer accommodated in a housing;
- a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer;
- and
- an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma;
- wherein at least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening.
2 more elements
Dependencies are inferred from the claim text.