Semiconductor device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChi-Chung JEN, Ya-Chi HUNG, Yu-Chun SHEN, Shun-Neng WANG, Wen-Chih CHIANG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChi-Chung JEN, Ya-Chi HUNG, Yu-Chun SHEN, Shun-Neng WANG, Wen-Chih CHIANG
Estimating the term…
In some implementations, one or more semiconductor processing tools may form a triple-stacked polysilicon structure on a substrate of a semiconductor device. The one or more semiconductor processing tools may form one or more polysilicon-based devices on the substrate of the semiconductor device, wherein the triple-stacked polysilicon structure has a first height that is greater than one or more second heights of the one or more polysilicon-based devices. The one or more semiconductor processing tools may perform a chemical-mechanical polishing (CMP) operation on the semiconductor device, wherein performing the CMP operation comprises using the triple-stacked polysilicon structure as a stop layer for the CMP operation.
A method, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.