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US 2023/0154941 A1Published application
Mask assembly and method for manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsJEONGKUK KIM, HWI KIM, YOUNGMIN MOON, SEUNGYONG SONG, AREUM LEE, EUNBEE JO, KYU HWAN HWANG
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Abstract
A mask assembly includes a frame including a frame opening, and a mask disposed on the frame. The mask includes a body portion including an upper surface and a lower surface opposing each other and deposition openings spaced apart from each other, protrusions protruding from the upper surface and surrounding the corresponding deposition openings, and at least one step formation pattern overlapping the protrusions in a plan view and disposed in the body portion.
Claims20
A mask assembly comprising:
- a frame including a frame opening;
- and
- a mask disposed on the frame and including:
- a body portion including:
- an upper surface and a lower surface opposing each other;
- deposition openings spaced apart from each other;
- protrusions protruding from the upper surface and surrounding the corresponding deposition opening;
- and
- at least one step formation pattern overlapping the protrusions in a plan view and disposed in the body portion.
6 more elements
A method for manufacturing a mask, the method comprising:
- disposing an insulating portion on a support substrate;
- primarily growing a plating film on the support substrate by a first electroforming process to form a primarily grown plating film;
- disposing an inclusion on an upper surface of the primarily grown plating film to surround the insulating portion;
- secondarily growing the primarily grown plating film to cover the inclusion by a second electroforming process to form a secondarily grown plating film;
- forming a deposition opening by removing the insulating portion from the secondarily grown plating film;
- and
- forming a mask by removing the support substrate,
- wherein a first region of an upper surface of the mask, overlapping the inclusion in a plan view has a greater thickness than a second region adjacent to the first region.
5 more elements
Dependencies are inferred from the claim text.