Semiconductor chip including align mark protection pattern and semiconductor package including semiconductor chip including the align mark protection pattern
AssigneeSK hynix Inc.
InventorHyun Chul SEO
Life of this patent
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Abstract
A semiconductor chip includes a chip body, a redistribution layer pattern disposed on a surface of the chip body, an alignment mark pattern disposed to be spaced apart from the redistribution layer pattern on the surface of the chip body, a first insulating pattern disposed to contact a side surface of the redistribution layer pattern and a side surface of the alignment mark pattern on the surface of the chip body, a second insulating pattern disposed on the redistribution layer pattern to protect the redistribution layer pattern, and an alignment mark protection pattern disposed on the alignment mark pattern.
Claims20
A semiconductor chip comprising:
- a chip body;
- a redistribution layer pattern disposed on a surface of the chip body;
- an alignment mark pattern disposed to be spaced apart from the redistribution layer pattern on the surface of the chip body;
- a first insulating pattern disposed to contact a side surface of the redistribution layer pattern and a side surface of the alignment mark pattern on the surface of the chip body;
- a second insulating pattern disposed on the redistribution layer pattern to protect the redistribution layer pattern;
- and
- an alignment mark protection pattern disposed on the alignment mark pattern.
A semiconductor chip comprising:
- a chip body;
- a redistribution layer pattern and an alignment mark pattern that are disposed to be spaced apart from each other on a surface of the chip body;
- an insulating pattern disposed on the redistribution layer pattern;
- and
- an alignment mark protection pattern disposed on the alignment mark pattern,
- wherein the alignment mark protection pattern includes a metal material, and
- wherein the alignment mark protection pattern offsets a height difference between the alignment mark pattern and the insulating pattern.
A semiconductor package comprising:
- a package substrate;
- and
- a semiconductor chip mounted over the package substrate and including an alignment mark pattern for alignment of the semiconductor chip over the package substrate,
- wherein the semiconductor chip comprises:
- a chip body;
- a redistribution layer pattern disposed on a surface of the chip body;
- an alignment mark pattern disposed to be spaced apart from the redistribution layer pattern on the surface of the chip body;
- a first insulating pattern disposed to contact a side surface of the redistribution layer pattern and a side surface of the alignment mark pattern on the surface of the chip body;
- a second insulating pattern disposed on the redistribution layer pattern to protect the redistribution layer pattern;
- and
- an alignment mark protection pattern disposed on the alignment mark pattern and offsetting a height difference between the second insulating pattern and the alignment mark pattern.
Dependencies are inferred from the claim text.