Spectroscopic device, spectroscopic method using the same, and method of fabricating semiconductor memory device using the same

A spectroscopic method using a spectroscopic device, wherein the spectroscopic device includes a light source part including a main light source and a plurality of auxiliary light sources, a diffraction part including a diffraction grating, a detection part including a plurality of pixels and an actuator, and an analyzing part connected to the detection part, wherein the spectroscopic method comprises:

• directing a first light, which is emitted from the light source part, to be incident on a target object such that a second light is reflected from the target object based on the first light being incident on the target object;
• diffracting the second light reflected from the target object to produce a third light that is the diffracted second light;
• detecting the third light;
• rotating and moving the detection part using the actuator to change a resolution per pixel of at least some pixels of the plurality of pixels in a wavelength-dependent manner;
• and
• obtaining information on wavelengths according to positions of the pixels of the detection part,
• wherein the auxiliary light sources are configured to emit light rays of different wavelengths.

A method of fabricating a semiconductor memory device, the method comprising:

• forming a mold structure including interlayer dielectric layers and sacrificial layers, which are alternately and repeatedly stacked on a substrate;
• forming vertical channel holes to penetrate the mold structure;
• performing a spectroscopic process on the mold structure and the vertical channel holes;
• forming vertical channel structures in the vertical channel holes;
• and
• forming gate electrodes to fill empty spaces, which are formed based on selectively removing the sacrificial layers of the mold structure,
• wherein the spectroscopic process includes
• directing a first light, which is emitted from a light source part including a main light source and a plurality of auxiliary light sources, to be incident on the mold structure such that a second light is reflected from the mold structure based on the first light being incident on the mold structure;
• diffracting the second light reflected from the mold structure to produce a third light that is the diffracted second light;
• detecting the third light;
• rotating and moving a detection part including an actuator and a plurality of pixels to change a resolution per pixel of at least some pixels of the plurality of pixels in a wavelength-dependent manner;
• and
• obtaining information on wavelengths according to positions of the pixels of the detection part based on the rotation and moving of the detection part using the actuator,
• the auxiliary light sources are configured to emit light rays of different wavelengths, and
• the actuator is used to rotate and move the detection part.