Parallel transfer apparatus

A transfer apparatus comprising:

• a mast portion;
• a first shuttle and a second shuttle configured to move along the mast portion, thereby transferring a carrier;
• a first belt coupled to the first shuttle, to move together with the first shuttle;
• and
• a second belt coupled to the second shuttle while extending through the first shuttle, to move together with the second shuttle,
• wherein the first shuttle comprises a belt through hole through which the second belt extends.

A transfer apparatus comprising:

• a mast portion comprising a base portion and a protrusion portion protruding from a first sidewall of the base portion;
• a first shuttle and a second shuttle configured to move along the first sidewall of the base portion, thereby transferring a carrier;
• a first counterweight and a second counterweight configured to move along a second sidewall of the base portion;
• a first belt interconnecting the first shuttle and the first counterweight;
• and
• a second belt interconnecting the second shuttle and the second counterweight,
• wherein the first and second shuttles overlap each other in a vertical direction, and
• wherein the first and second counterweights are spaced apart from each other in a horizontal direction.