Substrate transfer apparatus and substrate transfer method
AssigneeTokyo Electron Limited
InventorsAkinori SHIMAMURA, Hiroki OKA
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Abstract
There is a substrate transfer apparatus comprising: a circular tube having a tube axis extending in a lateral direction and having a transfer region for a substrate in the circular tube; a magnetic field generating portion having a magnetic field generating surface facing the transfer region and configured to generate a magnetic field on the magnetic field generating surface; and a transfer body configured to transfer the substrate while moving in a plane direction of the magnetic field generating surface in a state that the transfer body is distant from the magnetic field generating surface by the magnetic field.
Claims19
A substrate transfer apparatus comprising:
- a circular tube having a tube axis extending in a lateral direction and having a transfer region for a substrate in the circular tube;
- a magnetic field generating portion having a magnetic field generating surface facing the transfer region and configured to generate a magnetic field on the magnetic field generating surface;
- and
- a transfer body configured to transfer the substrate while moving in a plane direction of the magnetic field generating surface in a state that the transfer body is distant from the magnetic field generating surface by the magnetic field.
A substrate transfer method comprising:
- generating a magnetic field on a magnetic field generating surface facing a transfer region for a substrate, in a magnetic field generating portion disposed in a circular tube that extends in a lateral direction and have therein the transfer region;
- and
- transferring the substrate by moving a transfer body in a plane direction of the magnetic field generating surface in a state that the transfer body is distant from the magnetic field generating surface by the magnetic field.
Dependencies are inferred from the claim text.