Substrate processing apparatus and image capturing method
AssigneeTokyo Electron Limited
InventorsTadashi ENOMOTO, Nao AKASHI, Yutai MATSUHASHI, Masakazu YAMAMOTO
Life of this patent
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Abstract
A substrate processing apparatus includes: a chamber that accommodates a boat; a transfer mechanism that is provided inside the chamber, and transfers a substrate; a first camera that captures an image of a support column of the boat and the substrate; a support member that is inserted through an opening formed in a wall surface of the chamber, and supports the first camera; and a driver that drives the support member in order to move the first camera between a standby position and a measurement position.
Claims8
A substrate processing apparatus comprising:
- a chamber configured to accommodate a boat;
- a transfer mechanism including an arm and a fork, provided inside the chamber, and configured to transfer a substrate;
- a first camera configured to capture an image of a support column of the boat and the substrate;
- a camera support inserted through an opening formed in a wall surface of the chamber, and configured to support the first camera;
- and
- a driver configured to drive the camera support in order to move the first camera between a standby position and a measurement position.
An image capturing method comprising:
- providing a substrate processing apparatus including:
- a chamber configured to accommodate a boat;
- a transfer mechanism including an arm and a fork, provided inside the chamber, and configured to transfer a substrate;
- a first camera configured to capture an image of a support column of the boat and the substrate;
- a camera support inserted through an opening formed in a wall surface of the chamber, and configured to support the first camera;
- and
- a driver configured to drive the camera support, in order to move the
- first camera between a standby position and a measurement position,
- moving the first camera to the measurement position, and
- capturing an image of the support column of the boat and the substrate by the first camera.
Dependencies are inferred from the claim text.