Slide and pivot assemblies for process module bias assemblies of substrate processing systems

A slide and pivot assembly for a process module bias assembly of a substrate processing system, the slide and pivot assembly comprising:

• a plurality of bearing blocks configured to attach to a processing chamber and comprising bearings;
• a plurality of rails configured to slide relative to the plurality of bearing blocks via the bearings;
• a bias mounting plate configured to hold a portion of a process module for processing a substrate;
• and
• a hinge assembly attached to the plurality of rails and the bias mounting plate,
• wherein the bias mounting plate and the hinge assembly are configured to slide via the plurality of rails and bearings in a lateral direction relative to the processing chamber, and
• wherein the bias mounting plate is configured to pivot relative to the plurality of rails while the slide and pivot assembly is in at least a partially pulled out state.

A tool comprising:

• a wafer transfer module;
• a first row of stations on a first side of the wafer transfer module;
• and
• a second row of stations on a second side of the wafer transfer module,
• wherein
• the wafer transfer module is configured to transfer substrates to and from the first row of stations and the second row of stations, and
• each station in the first row of stations and the second row of stations comprises
• a processing chamber,
• a slide and pivot assembly attached to the processing chamber, and
• a bias assembly attached to the slide and pivot assembly and a substrate support, and configured to be pulled out and pivoted away from the processing chamber via the slide and pivot assembly.