Connected processing container and substrate processing method
AssigneeTokyo Electron Limited
InventorTakayuki YAMAGISHI
Life of this patent
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Abstract
There is provided a connected processing container comprising: a first processing container and a second processing container arranged side by side in a horizontal direction with a gap therebetween and respectively accommodating a substrate for vacuum processing; a first block portion fixed to the first processing container; a second block portion fixed to the second processing container and arranged side by side in the horizontal direction with respect to the first block portion; and a rail portion to which the first block portion and the second block portion are slidably connected, the rail portion being provided so as to straddle the first processing container and the second processing container.
Claims11
A connected processing container comprising:
- a first processing container and a second processing container arranged side by side in a horizontal direction with a gap therebetween and respectively accommodating a substrate for vacuum processing;
- a first block portion fixed to the first processing container;
- a second block portion fixed to the second processing container and arranged side by side in the horizontal direction with respect to the first block portion;
- and
- a rail portion to which the first block portion and the second block portion are slidably connected, the rail portion being provided so as to straddle the first processing container and the second processing container.
A substrate processing method for collectively transferring and storing substrates in a first processing container and a second processing container arranged side by side in a horizontal direction with a gap therebetween, and performing vacuum processing on each of the substrates, the substrate processing method comprising:
- by using a first block portion fixed to the first processing container, a second block portion fixed to the second processing container and arranged side by side in the horizontal direction with respect to the first block portion, and a rail portion to which the first block portion and the second block portion are slidably connected, which is provided so as to straddle the first processing container and the second processing container, sliding at least one of the first block portion and the second block portion in the horizontal direction with respect to the rail portion when thermal expansion occurs in each of the first processing container and the second processing container.
Dependencies are inferred from the claim text.