Asc process automation device
AssigneeSK Siltron Co., Ltd.
InventorsHo Yong LEE, Sung Ho KIM, Jae Min SEOK
Life of this patent
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Abstract
The present invention provides an ASC process automation device including: a loading part into which an ingot having been subjected to a wire sawing is input; a kerosene cleaning part for cleaning the ingot with kerosene; a precleaning part for precleaning the ingot; a main cleaning part for cleaning the ingot multiple times; a wafer peeling part for peeling the ingot to produce multiple wafers; and a transport unit for moving the ingot linearly and upward/downward while proceeding to the kerosene cleaning part, the precleaning part, the main cleaning part, and the wafer peeling part.
Claims15
An ASC process automation apparatus comprising:
- a loading unit configured to allow an ingot subjected to wire sawing to be loaded thereon;
- a kerosene cleaning unit configured to clean the ingot using kerosene;
- a pre-cleaning unit configured to pre-clean the ingot;
- a main cleaning unit configured to clean the ingot multiple times;
- a wafer separation unit configured to split the ingot into a plurality of wafers;
- and
- a conveying unit configured to convey the ingot linearly and move the ingot upwards and downwards while passing by the kerosene cleaning unit, the pre-cleaning unit, the main cleaning unit, and the wafer separation unit.
An ASC process automation apparatus comprising:
- an ingot formed such that a beam is attached to wafers;
- a conveying unit configured to convey the ingot linearly and move the ingot upwards and downwards;
- and
- a rail unit configured to allow the conveying unit to be mounted thereto,
- wherein the conveying unit comprises:
- a clamping unit configured to clamp the ingot;
- a linear conveying unit mounted so as to be linearly movable along the rail unit;
- and
- an upward/downward conveying unit configured to move the clamping unit upwards and downwards.
Dependencies are inferred from the claim text.