Pre-clean chamber assembly architecture for improved serviceability

A pre-clean assembly suitable for use in semiconductor manufacturing, comprising:

• a pre-clean process module comprising:
• a pre-clean chamber comprising a lid, a substrate support pedestal, and a plate stack, wherein the lid is rotatable about an axis of rotation;
• a gas panel disposed below the pre-clean chamber;
• an isolation port disposed on a first side of the pre-clean process module and extending in a first direction;
• a manometer disposed on the first side and extending in the first direction;
• a pre-clean control module disposed separate from the pre-clean process module and comprising:
• a power supply;
• and
• a controller;
• and
• a cable conduit disposed between the pre-clean process module and the pre-clean control module, the cable conduit having a length of greater than about 400 mm.

An apparatus for substrate processing suitable for use in semiconductor manufacturing, comprising:

• a transfer chamber:
• a factory interface coupled to a first side of the transfer chamber;
• four process chambers coupled to the transfer chamber;
• a first pre-clean process module coupled to a second side of the transfer chamber between the factory interface and a first of the process chambers, the first pre-clean process module comprising a pre-clean chamber and a gas panel disposed below the pre-clean chamber, the pre-clean chamber coupled to the transfer chamber and further comprising a lid with an axis of rotation adjacent to the transfer chamber, such that the lid rotates towards the transfer chamber when opening;
• a first pre-clean control module disposed separate from the first pre-clean process module and adjacent to the first of the process chambers, the first pre-clean control module comprising a power supply and a controller configured to control a pre-clean process within the pre-clean chamber;
• and
• a first cable conduit disposed between the first pre-clean process module and the first pre-clean control module and configured to hold one or more electric cables and one or more control cables therein.