Magnet system, sputtering device and housing cover
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsThorsten SANDER, Klaus SCHNEIDER, Frank Meissner, Goetz GROSSER, Steffen MOSSHAMMER
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Abstract
Disclosed herein are systems, methods, devices for a magnet system that includes a housing with a housing interior. The magnet system also includes a magnet holder disposed in the housing interior and supported by the housing, preferably stationary with respect thereto. The magnet system also includes a housing cover forming a fluid-tight chamber when mated with the housing, wherein the housing cover includes a gear stage, a generator, and a rotary coupling that couples the gear stage to the generator.
Claims20
A magnet system comprising:
- a housing comprising a housing interior;
- a magnet holder arranged in the housing interior and supported by the housing;
- and
- a housing cover which, when assembled with the housing, forms a fluid-tight chamber, wherein the housing cover comprises:
- a gear stage;
- a generator;
- and
- a rotary coupling that couples the gear stage to the generator.
A sputtering device comprising:
- a bearing device;
- and
- a magnet system comprising:
- a housing comprising a housing interior;
- a magnet holder arranged in the housing interior and supported by the housing;
- and
- a housing cover which, when assembled with the housing, forms a fluid-tight chamber, wherein the housing cover comprises:
- a gear stage;
- a generator;
- and
- a rotary coupling that couples the gear stage to the generator, wherein the magnet system is stationarily supported within the sputtering target by means of the bearing device.
A housing cover comprising:
- a first gear wheel;
- a generator;
- a flange penetrated by a through-hole, wherein the flange is positioned between the first gear wheel and the generator and has a sealing surface on a side facing the generator, wherein the generator is coupled on an end face of the flange;
- a second gear wheel coupled to the first gear wheel;
- and
- a rotary coupling configured to couple rotary motion of the second gear wheel to the generator through the through-hole, wherein the housing cover is a unitary assembly that may be mounted on or demounted from a housing.
Dependencies are inferred from the claim text.