Magnet system, sputtering device and method
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsKlaus SCHNEIDER, Goetz GROSSER, Thorsten SANDER, Ralf HAUSWALD
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Abstract
Disclosed herein are systems, devices, and methods for a magnet system for a sputtering device. The disclosed magnet system may include a housing having a housing interior. The magnet system may also include a magnet holder disposed in the housing interior and supported by the housing in a preferably stationary manner. The magnet system may also include a dehumidifying device adjacent to or disposed in the housing interior for drying the housing interior.
Claims20
A magnet system for a sputtering a device, the magnet system comprising:
- a housing comprising a housing interior;
- a magnet holder arranged in the housing interior and supported by means of the housing;
- and
- a dehumidifying device adjacent to or disposed within the housing interior for dehumidifying the housing interior.
A method for dehumidifying a magnet system, the method comprising:
- extracting from a housing interior of the magnet system a first fluid with which the housing interior is filled and in which a magnet holder of the magnet system is embedded;
- and
- introducing a second fluid into the housing interior, wherein the second fluid has a lower molar fraction of gaseous water or a higher molar fraction of liquid water than the first fluid.
Dependencies are inferred from the claim text.