Magnetic housing systems

A chamber comprising:

• a chamber body;
• a chamber lid having a gas distribution assembly;
• a substrate support positioned opposite the gas distribution assembly to define a process volume, the process volume having a center axis;
• a radio frequency (RF) source operable to be coupled to an electrode disposed within substrate support;
• and
• an electromagnet magnetic housing system having an electromagnet housing coupled to the chamber, the electromagnet housing comprises:
• an upper plate;
• an outer sidewall;
• an inner sidewall defining a round central opening;
• a lower plate;
• and
• two or more conductive wires having alternating polarities, each of the conductive wires coiled one or more times in respective portions of the electromagnet housing, each of the conductive wires are operable to be individually connected to a power source.

A chamber comprising:

• a chamber body;
• a chamber lid having a gas distribution assembly;
• a substrate support positioned opposite the gas distribution assembly to define a process volume, the process volume having a center axis;
• a radio frequency (RF) source operable to be coupled to an electrode disposed within substrate support;
• and
• an electromagnet magnetic housing system having an electromagnet housing coupled to the chamber, the electromagnet housing comprises:
• an upper plate;
• an outer sidewall;
• an inner sidewall defining a round central opening;
• a lower plate;
• a first conductive wire coiled in a semi-circle having an angular arc of about 90 degrees or less and disposed in a first quadrant of the electromagnet housing corresponding to a first quadrant of the process volume;
• a second conductive wire coiled in a semi-circle having an angular arc of about 90 degrees or less and disposed in a second quadrant of the electromagnet housing corresponding to a second quadrant of the process volume;
• a third conductive wire coiled in a semi-circle having an angular arc of about 90 degrees or less and disposed in a third quadrant of the electromagnet housing corresponding to a third quadrant of the process volume;
• and
• a fourth conductive wire coiled one or more times in a semi-circle having an angular arc of about 90 degrees or less and disposed in a fourth quadrant of the electromagnet housing corresponding to a fourth quadrant, wherein the first, second, third, and fourth conductive wires have alternating polarities and are operable to be individually connected to a power source.