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US 2023/0154725 A1Published application
Emitter for emitting charged particles
AssigneeASML Netherlands B.V.
InventorJurgen VAN SOEST
Life of this patent
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Abstract
An emitter is configured to emit charged particles. The emitter comprises a body, a metal layer and a charged particle source layer. The body has a point. The metal layer is of a first metal on at least the point. The charged particle source layer is on the metal layer. The point comprises a second metal other than the first metal.
Claims20
An emitter configured to emit charged particles, the emitter comprising:
- a body having a point;
- a metal layer of a first metal on at least the point;
- and
- a charged particle source layer on the metal layer, the charged particle source layer comprising graphene,
- wherein the point comprises a second metal other than the first metal.
2 more elements
An illumination apparatus comprising a charged particle source comprising an emitter configured to emit charged particles, the emitter comprising:
- a body having a point;
- a metal layer on at least the point;
- and a charged particle source layer on the metal layer, wherein the point comprises a different metal from the metal layer and the charged particle source layer comprises graphene.
A method of emitting a beam of charged particles, the method comprising:
- providing an emitter configured to emit charged particles, the emitter comprising a charged particle source layer on a metal at a point of a body of the emitter;
- and
- heating the point to a temperature of greater than 500° C. so as to promote thermionic emission.
Dependencies are inferred from the claim text.