Liquid filter apparatus with thermal shield
AssigneeQolibri, Inc.
InventorImad Mahawili
Life of this patent
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Abstract
A liquid filter apparatus for gas/solid separation includes a housing with a filter chamber, a semiconductor process gas inlet, and a process gas outlet. The filter chamber forms a liquid reservoir, and the semiconductor process gas inlet and the process gas outlet are in communication with the filter chamber. The housing further includes a filter liquid inlet and a filter liquid outlet, which are in communication with the liquid reservoir for delivering and removing filter fluid, respectively, to and from the liquid reservoir.
Claims20
A liquid filter apparatus for semiconductor process waste, said liquid filter apparatus comprising:
- a housing having a filter chamber, a process waste inlet, a process waste outlet, and a feed tube in communication with said process waste inlet and said filter chamber, said feed tube having a feed tube outlet, said filter chamber forming a liquid reservoir holding a filter liquid therein, and said process waste outlet in communication with said filter chamber;
- and
- a deflecting surface interposed between the filter liquid and said feed tube outlet, said deflecting surface deflecting the process waste to prevent direct impingement of the process waste flowing from the feed tube with the filter liquid and further absorbing heat from the process waste.
A method of separating solids from process waste in a semiconductor processing system using a liquid filter, said method comprising the steps of:
- providing a liquid filter with a feed tube, a filter chamber, and exhaust outlet, the feed tube having a feed tube outlet;
- forming a liquid reservoir in the filter chamber;
- holding a filter liquid in the liquid reservoir;
- providing an indirect pre-filter fluid pathway from the feed tube outlet to the liquid reservoir;
- and
- directing the process waste into the indirect pre-filter fluid pathway of the filter chamber from the feed tube and thereafter directing the process waste into the liquid reservoir of the filter chamber.
Dependencies are inferred from the claim text.