Reticle pod including motion limiting features and method of assembling same
AssigneeEntegris, Inc.
InventorsRuss V. Raschke, Brian Wiseman
Life of this patent
Estimating the term…
Abstract
Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.
Claims8
A reticle pod, comprising:
- an inner pod including a baseplate and a cover, wherein:
- the inner pod includes at least one gross alignment feature and a plurality of motion limiting features, each of the plurality of motion limiting features including:
- an alignment retention cutout formed in one of the cover or the baseplate and an elastic bodies disposed in the alignment retention cutout, wherein the elastic body is configured to contact both of the baseplate and the cover when the inner pod is assembled, and
- wherein the plurality of motion limiting features are configured such that when a force having a component parallel to a plane of the baseplate or the cover is applied to the inner pod, at least one of the plurality of motion limiting features provides resistance to the force prior to the at least one gross alignment feature providing resistance to the force.
A reticle pod, comprising:
- an inner pod including a baseplate and a cover, wherein:
- the inner pod includes at least one gross alignment feature and a plurality of motion limiting features, each of the plurality of motion limiting features including:
- a mating pin extending from one of the cover or the baseplate, and an elastic contact surface provided on the other of the cover or the baseplate, wherein the mating pin is configured to contact the elastic contact surfaces when the inner pod is assembled, and
- wherein the plurality of motion limiting features are configured such that when a force having a component parallel to a plane of the baseplate or the cover is applied to the inner pod, at least one of the plurality of motion limiting features provides resistance to the force prior to the at least one gross alignment feature providing resistance to the force.
A reticle pod, comprising:
- an inner pod including a baseplate and a cover, wherein:
- the inner pod includes at least one gross alignment feature and a plurality of motion limiting features, each of the plurality of motion limiting features including:
- a diaphragm disposed in one of the cover or the baseplate;
- a pin extending from the other of the cover or the baseplate, the pin configured to contact the diaphragm when the inner pod is assembled;
- wherein the diaphragm has a resistance to deformation in a direction in plane with the cover or the baseplate that is greater than a resistance to deformation in a direction perpendicular to a plane of the cover or the baseplate, and
- each of the pins have a taper at an end configured to contact one of the plurality of diaphragms,
- wherein the plurality of motion limiting features are configured such that when a force having a component parallel to a plane of the baseplate or the cover is applied to the inner pod, at least one of the plurality of motion limiting features provides resistance to the force prior to the at least one gross alignment feature providing resistance to the force.
8-20. (canceled)
Dependencies are inferred from the claim text.