Metal-insulator-metal (mim) energy storage device with layered stack and manufacturing method

A method of manufacturing a metal-insulator-metal (MIM) energy storage device, comprising the steps of:

• providing a substrate with a bottom electrode;
• providing, on the bottom electrode, a plurality of electrically conductive nanostructures in such a way that each nanostructure in the plurality of electrically conductive nanostructures extends substantially vertically from the bottom electrode and a first end of the nanostructure is in electrically conductive contact with the bottom electrode;
• applying a conformal bottom conduction-controlling layer on each nanostructure in the plurality of electrically conductive nanostructures provided on the bottom electrode;
• and
• forming, on the bottom conduction-controlling layer, a layered stack of alternating conduction-controlling layers and electrode layers conformally coating the bottom conduction-controlling layer, the layered stack including at least a first odd-numbered electrode layer at a bottom of the layered stack, a first odd-numbered conduction-controlling layer directly on the first odd-numbered electrode layer, and a first even-numbered electrode layer directly on the first odd-numbered conduction-controlling layer,
• wherein the layered stack is formed in such a way that each even-numbered electrode layer in the layered stack is electrically conductively connected to the bottom electrode, and each odd-numbered electrode layer in the layered stack is electrically conductively connected to any other odd-numbered electrode layer in the layered stack.