Optical path correction subassembly, optical detection assembly, and optical detection system

An optical detection assembly, comprising:

• a light detector having a light receiving surface;
• and
• an optical path correction subassembly including a holder structure detachably disposed on the light detector and an optical path correction structure carried by the holder structure;
• wherein, the optical path correction structure has a light beam guiding surface arranged as a reverse inclination facing the light receiving surface of the light detector in a vertical direction, and the light beam guiding surface of the optical path correction structure is arranged at an acute angle relative to the light receiving surface of the light detector;
• wherein, the light beam guiding surface of the optical path correction structure is configured to guide a predetermined light beam to the light receiving surface of the light detector so as to facilitate collection of the predetermined light beam.

An optical detection system, comprising:

• a chuck stage including a chuck for carrying a plurality of predetermined objects;
• an optical probe assembly configured to be disposed above the chuck for optically detecting the predetermined object;
• and
• an optical detection assembly configured adjacent to the chuck of the chuck stage for optically detecting a predetermined light beam provided by the optical probe assembly;
• wherein the optical detection assembly includes a light detector and an optical path correction subassembly, the light detector has a light receiving surface, and the optical path correction subassembly includes a holder structure detachably disposed on the light detector and an optical path correction structure carried by the holder structure;
• wherein, the optical path correction structure has a light beam guiding surface arranged as a reverse inclination facing the light receiving surface of the light detector in a vertical direction, and the light beam guiding surface of the optical path correction structure is arranged at an acute angle relative to the light receiving surface of the light detector;
• wherein, the light beam guiding surface of the optical path correction structure is configured to guide the predetermined light beam to the light receiving surface of the light detector so as to facilitate collection of the predetermined light beam;
• wherein an upper surface of the optical path correction structure of the optical path correction subassembly is equal to or lower than a wafer carrying surface of the chuck of the chuck stage.