Optical element for the vuv wavelength range, optical arrangement, and method for manufacturing an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsFelix LANGE, Larissa WALTER
Life of this patent
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Abstract
An optical element (7, 8) for the VUV wavelength range includes a substrate (7a, 8a), and a coating (15) applied to the substrate (7a, 8a). The coating (15) has at least one fluorine scavenger layer (17, 17a, . . . , 17n) having a fluoride material (Mx+Fx−) doped with at least one preferably metallic dopant ion (Ax+). Also described are an optical arrangement that includes at least one such optical element (7, 8), as well as a method for producing such an optical element (7, 8).
Claims19
An optical element for the very-ultraviolet (VUV) wavelength range, comprising:
- a substrate, and a coating applied to the substrate,
- wherein the coating has at least one fluorine scavenger layer comprising a fluoride material doped with at least one dopant ion, and
- wherein the coating has at least one fluoride layer and the fluorine scavenger layer is applied to a side of the fluoride layer remote from the substrate.
A method for producing an optical element for the very ultraviolet (VUV) wavelength range, comprising:
- applying a coating to a substrate,
- wherein said applying of the coating comprises applying at least one fluorine scavenger layer, where the fluorine scavenger layer includes a fluoride material doped with at least one dopant ion,
- wherein the coating comprises at least one fluoride layer, and
- applying the at least one fluorine scavenger layer to a side of the fluoride layer remote from the substrate.
Dependencies are inferred from the claim text.