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US 2023/0147452 A1Published application
Substrate pedestal for improved substrate processing
AssigneeApplied Materials, Inc.
InventorsViren KALSEKAR, Vinay K. PRABHAKAR, Venkata Sharat Chandra PARIMI
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Abstract
A substrate pedestal includes a thermally conductive substrate support including a mesh, a thermally conductive shaft including a plurality of conductive rods therein, each conductive rod having a first end and a second end, and a sensor. The first end of each conductive rod is electrically coupled to the mesh, and the sensor is disposed between the first and second ends of each conductive rod and configured to detect current flow through each conductive rod.
Claims20
A substrate pedestal, comprising:
- a thermally conductive substrate support comprising a mesh;
- a thermally conductive shaft comprising a plurality of conductive rods therein, each conductive rod having a first end and a second end;
- and
- a sensor, wherein
- the first end of each conductive rod is electrically coupled to the mesh, and
- the sensor is disposed between the first and second ends of each conductive rod and configured to detect current flow through each conductive rod.
3 more elements
A substrate pedestal, comprising:
- a thermally conductive substrate support comprising a mesh;
- a thermally conductive shaft comprising a braided rod therein, wherein the braided rod comprises:
- a plurality of conductive rods, each conductive rod having a first end and a second end;
- and
- the plurality of conductive rods are braided along a length of the braided rod, and
- the first end of each conductive rod is electrically coupled to the mesh.
3 more elements
A substrate pedestal, comprising:
- a thermally conductive substrate support comprising a mesh;
- a thermally conductive shaft comprising a plurality of conductive rods braided to form a braided rod surrounded by an insulating layer and having a first end and a second end;
- and
- a first braze joint connecting the mesh and a first conductive rod of the braided rod, the first braze joint comprising:
- a first adapter having a third end and a fourth end, the first adapter comprising a hollow tube disposed beneath the mesh;
- and
- a first terminal having a fifth end and a sixth end, wherein,
- the third end of the first adapter is brazed to the mesh,
- the fourth end of the first adapter is brazed to the fifth end of the first terminal, and
- the first end of the braided rod is brazed to the sixth end of the first terminal.
7 more elements
Dependencies are inferred from the claim text.