Manufacturing method of display panel, display panel, and display device
AssigneeShenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorXiaobo HU
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Abstract
A manufacturing method of display panel, a display panel and a display device are disclosed. The manufacturing method includes following steps: providing a substrate, forming a first barrier layer on the substrate, forming a conductive layer on the first barrier layer, forming a second barrier layer on the conductive layer, forming a photoresist pattern on the second barrier layer, and then performing a plasma treatment on the photoresist pattern to form a first gap between the photoresist pattern and the second barrier layer.
Claims18
A manufacturing method of a display panel, comprising steps of:
- providing a substrate;
- forming a first barrier layer on the substrate;
- forming a conductive layer on the first barrier layer;
- forming a second barrier layer on the conductive layer;
- coating a photoresist on the second barrier layer, exposing and developing the photoresist to form a photoresist pattern;
- performing a first wet etching on the first barrier layer, the conductive layer, and the second barrier layer, to form a first protrusion on an end of the second barrier layer;
- performing a plasma treatment on the photoresist pattern, to form a first gap between the photoresist pattern and the second barrier layer;
- performing a second wet etching on the first barrier layer, the conductive layer, and the second barrier layer;
- and
- stripping off the photoresist pattern.
A display panel comprising a substrate, a first barrier layer disposed on the substrate, a conductive layer disposed on the first barrier layer, and a second barrier layer disposed on the conductive layer;
- wherein a sectional width of the first barrier layer, a sectional width of the conductive layer, and a sectional width of the second barrier layer decrease in sequence.
A display device comprising a driver chip and a display panel, wherein the display panel comprises a substrate, a first barrier layer disposed on the substrate, a conductive layer disposed on the first barrier layer, and a second barrier layer disposed on the conductive layer;
- wherein a sectional width of the first barrier layer, a sectional width of the conductive layer, and a sectional width of the second barrier layer decrease in sequence.
Dependencies are inferred from the claim text.