Apparatus for and method of manufacturing display device
AssigneeSamsung Display Co., Ltd.
InventorsSeoyeon Kim, Hongkyun Ahn, Sujung Kang, Jiyun Chun, Sangwoo Jo
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Abstract
An apparatus for manufacturing a display device includes a mask arranged to face a substrate and a deposition source arranged to face the mask, wherein the mask includes a frame that includes a plurality of first frames that extend in a first direction and a plurality of second frames that extend in a second direction that intersects the first direction, an opening defined by the plurality of first frames and the plurality of second frames, and a plurality of laser marks located on at least one of the plurality of first frames and the plurality of second frames and generated by irradiating a laser beam.
Claims20
An apparatus for manufacturing a display device, the apparatus comprising:
- a mask arranged to face a substrate;
- and
- a deposition source arranged to face the mask,
- wherein the mask comprising:
- a frame comprising a plurality of first frames that extend in a first direction and a plurality of second frames that extend in a second direction that intersects the first direction;
- an opening defined by the plurality of first frames and the plurality of second frames;
- a plurality of laser marks located on at least one of the plurality of first frames and the plurality of second frames and generated by irradiating a laser beam.
A method of manufacturing a display device, the method comprising:
- arranging a substrate in a chamber;
- arranging a mask to face the substrate;
- and
- depositing a deposition material on the substrate through the mask by using a deposition source arranged to face the mask,
- wherein the mask comprises:
- a frame comprising a plurality of first frames that extend in a first direction and a plurality of second frames that extend in a second direction that intersects the first direction;
- an opening defined by the plurality of first frames and the plurality of second frames;
- protrusions that protrude from one surface of the frame along a circumference of the opening;
- and
- a plurality of laser marks located on at least one of the plurality of first frames and the plurality of second frames and generated by irradiating a laser beam.
Dependencies are inferred from the claim text.