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US 2023/0147031 A1Published application
Strain gauge
AssigneeMINEBEA MITSUMI Inc.
InventorsAtsushi KITAMURA, Toshiaki ASAKAWA, Aya ONO, Akiyo YUGUCHI
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Abstract
A strain gauge includes a flexible resin substrate and a resistor formed of a film that includes Cr, CrN, and Cr2N, the resistor being situated on or above the substrate. A film thickness of the resistor is greater than or equal to 100 nm and less than or equal to 700 nm.
Claims10
A strain gauge comprising:
- a flexible resin substrate;
- and
- a resistor formed of a film that includes Cr, CrN, and Cr2N, the resistor being situated on or above the substrate,
- wherein a film thickness of the resistor is greater than or equal to 100 nm and less than or equal to 700 nm.
1 more element
Dependencies are inferred from the claim text.