Customized Thin Film Optical Element Fabrication System and Method

A method for making a thin film optical element comprising:

• (a) placing a substrate in a holder socket of a holder;
• wherein the substrate has a first deposition side;
• wherein the holder comprises at least one holder opening;
• wherein the holder has a holder outer side and a holder inner side;
• wherein the holder outer side has at least one beveled edge extending into a lip;
• wherein the beveled edge and the lip define the at least one holder opening;
• wherein the lip has a substantially flat side and a beveled edge side;
• wherein the beveled edge and/or the beveled edge side of the lip form an angle of less than about 45° with the substantially flat side of the lip and/or the first deposition side;
• wherein the substantially flat side of the lip and the holder inner side define the holder socket;
• and
• (b) depositing, with a deposition plume, a first thin film stack on a first deposition side of the substrate to form a thin film optical element, wherein the thin film optical element comprises the substrate and the first thin film stack deposited on the first deposition side of the substrate;
• wherein the first thin film stack comprises two or more film layers;
• wherein the first thin film stack is characterized by a first uniform film thickness;
• and wherein the first uniform film thickness is defined as a thickness variation of less than about ±5% in any 10 mm2 of the first thin film stack, when compared to an average first thin film stack thickness across the entire first thin film stack;
• wherein a portion of the first deposition side of the substrate contacts the substantially flat side of the lip;
• wherein the holder opening exposes the first deposition side of the substrate to the deposition plume;
• wherein the beveled edge side of the lip and/or the beveled edge provide for the first uniform film thickness of the first thin film stack;
• wherein the deposition plume travels towards the first deposition side of the substrate at a direction substantially perpendicular to the substantially flat side of the lip and/or to the first deposition side;
• and wherein the beveled edge side of the lip faces the deposition plume.