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US 2023/0146929 A1Published application
Platen Shield Cleaning System
AssigneeApplied Materials, Inc.
InventorsShantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Arron Davis, Allen L. D`Ambra
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Abstract
In a chemical mechanical polishing system, a platen shield cleaning assembly is installed on a rotatable platen in a gap between the rotatable platen and a platen shield. The assembly includes a sponge holder attached to the platen and a sponge. The sponge is held by the sponge holder such that an outer surface of the sponge is pressed against an inner surface of the platen shield.
Claims16
An assembly comprising:
- a rotatable platen;
- a platen shield surrounding the platen and separated from the platen by a gap;
- a sponge holder attached to the platen and situated in the gap;
- and
- a sponge held by the sponge holder such that an outer surface of the sponge is pressed against an inner surface of the platen shield.
2 more elements
A platen shield cleaning method comprising:
- installing a sponge and a sponge holder in a gap between a platen and a platen shield;
- urging the sponge into contact with the platen shield;
- and
- rotating the platen and the platen, the sponge holder, and, the sponge, the sponge in contact with the platen shield.
1 more element
Dependencies are inferred from the claim text.