Hollow-Core Photonic Crystal Fiber Based Optical Component for Broadband Radiation Generation
AssigneeASML Netherlands B.V.
InventorsPatrick Sebastian UEBEL, Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ
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Abstract
Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
Claims20
An optical component configured to function as an optical frequency converter in a broadband radiation source device, the optical component comprising:
- a gas cell;
- and
- a hollow-core photonic crystal fiber at least partially enclosed within the gas cell,
- wherein the gas cell comprises a plurality of sub-cells, the plurality of sub-cells comprising:
- two end sub-cells enclosing respective ends of the hollow-core photonic crystal fiber;
- and
- a central sub-cell between the two end sub-cells.
Dependencies are inferred from the claim text.