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US 2023/0146837 A1Published application
Apparatus and methods for fine planar non-uniformity improvement
AssigneeApplied Materials, Inc.
InventorsMuhannad Mustafa, Mario D. Silvetti, Mandyam Sriram, Sanjeev Baluja
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Abstract
Pedestal heater radiators, pedestal assemblies including the pedestal heater radiators and methods of decreasing deposition non-uniformity are described. The pedestal heater radiator has a first radiator body and a second radiator body with different emissivities. The first radiator body and second radiator body are sized and positioned to decrease the heat loss differential between sides of the pedestal.
Claims20
A pedestal heater radiator comprising:
- a first radiator body comprising a central clamping portion and an outer peripheral portion, the first radiator body having a top surface and a bottom surface defining a thickness, the first radiator body comprising a first material having a first emissivity;
- and
- a second radiator body connected to a portion of the first radiator body by at least two connection points, the second radiator body having a top surface and a bottom surface defining a thickness, the second radiator body comprising a second material having a second emissivity different from the first emissivity.
A method of decreasing film thickness non-uniformity, the method comprising:
- determining a size of a first radiator body having a first emissivity and a second radiator body having a second emissivity;
- assembling the first radiator body with the second radiator body by connecting at least one connection tab on the second radiator body to at least one connection hub on the first radiator body to form a single component radiator body;
- and
- positioning the single component radiator body adjacent a bottom surface of a heater positioned on a top end of the pedestal shaft.
1 more element
Dependencies are inferred from the claim text.