Planarization apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorHiroshi Kurosawa
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Abstract
A planarization apparatus includes a plurality of processors each configured to perform a planarization process on a substrate. Each of the processors includes a substrate chuck, and is configured to perform a planarization process on a substrate chucked by the substrate chuck. A conveyer is configured to convey a substrate chuck of a processor selected from the plurality of processors along a conveyance path including a common conveyance path shared by the plurality of processors. A supplier is arranged on a path of movement of the substrate chuck by the conveyer along the common conveyance path, and is configured to supply a composition to be used in the planarization process onto the substrate chucked by the substrate chuck.
Claims11
A planarization apparatus comprising:
- a plurality of processors each including a substrate chuck, and configured to perform a planarization process on a substrate chucked by the substrate chuck;
- a conveyer configured to convey a substrate chuck of a processor selected from the plurality of processors along a conveyance path including a common conveyance path shared by the plurality of processors;
- and
- a supplier arranged on a path of movement of the substrate chuck by the conveyer along the common conveyance path, and configured to supply a composition to be used in the planarization process onto the substrate chucked by the substrate chuck.
Dependencies are inferred from the claim text.