Active oxygen supply device, device for conducting treatment by active oxygen, and method for conducting treatment by active oxygen

A device for treating a surface of an object to be treated with active oxygen, wherein

• the device comprises a plasma generator and an ultraviolet light source in a housing having at least one opening
• the plasma generator is a plasma actuator that is provided with a first electrode and a second electrode with a dielectric in-between, and that generates an induced flow including ozone by applying a voltage between the two electrodes,
• the plasma actuator is arranged so that the induced flow flows out of the housing from the opening, and
• the ultraviolet light source irradiates the induced flow with ultraviolet light and generates active oxygen in the induced flow.

A treatment method for treating a surface of an object to be treated with active oxygen, comprising:

• a step of providing a device for treatment with active oxygen comprising a plasma generator and an ultraviolet light source in a housing having at least one opening,
• the plasma generator being a plasma actuator that is provided with a first electrode and a second electrode with a dielectric in-between, and that generates an induced flow including ozone by applying a voltage between the two electrodes, the plasma actuator being arranged so that the induced flow flows out of the housing from the opening, and the ultraviolet light source irradiating the induced flow with ultraviolet light and generating active oxygen in the induced flow;
• a step of placing the device for treatment with active oxygen and the object to be treated at relative positions such that a surface of the object to be treated is exposed when the induced flow is caused to flow from the opening;
• and
• a step of causing the induced flow to flow from the opening to treat the surface of the object to be treated with active oxygen.