Imprint apparatus and article manufacturing method

An imprint apparatus for forming a pattern of an imprint material on a substrate surface of a substrate by using a mold, the imprint apparatus comprising:

• a mold holding unit configured to hold the mold;
• a mold driving unit configured to move the mold holding unit;
• a substrate holding unit configured to hold the substrate;
• a substrate driving unit configured to move the substrate holding unit;
• and
• a controller configured to control the mold driving unit and the substrate driving unit,
• wherein the controller is configured to perform:
• a contacting step of moving at least one of the mold holding unit and the substrate holding unit by at least one of the mold driving unit and the substrate driving unit such that the mold and the imprint material on the substrate surface are brought into contact with each other;
• an obtaining step of obtaining a driving force in a first direction parallel to the substrate surface for the substrate holding unit by the substrate driving unit after performing the contacting step;
• and
• a tilt correcting step of rotating the mold holding unit about a second direction perpendicular to the first direction in the substrate surface by the mold driving unit based on a magnitude of the driving force obtained in the obtaining step.