Use of cover members when preparing a melt of silicon in a crucible assembly
AssigneeGlobalWafers Co., Ltd.
InventorsPaolo Tosi, Matteo Pannocchia, Roberto Scala
Life of this patent
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Abstract
Crystal pulling system having a housing and a crucible assembly are disclosed. The system includes a heat shield that defines a central passage through which an ingot passes during ingot growth. A cover member is moveable within the heat shield along a pull axis. The cover member may include an insulation layer. The cover member covers at least a portion of the charge during meltdown.
Claims14
A method for preparing a melt of silicon in a crucible of a crystal pulling system, the crystal pulling system comprising a housing defining a growth chamber, a crucible assembly disposed within the growth chamber for containing the silicon melt and a heat shield that defines a central passage through which an ingot passes during ingot growth, the method comprising:
- adding a charge of solid polycrystalline silicon to the crucible assembly;
- lowering a cover member through the central passage defined by the heat shield to cover at least a portion of the charge;
- heating the silicon charge to produce a silicon melt in the crucible assembly while the cover member covers a portion of the charge;
- and
- raising the cover member after the melt has been formed.
Dependencies are inferred from the claim text.