Actuator device
AssigneeHamamatsu Photonics K.K.
InventorsDaiki Suzuki, Takuma Osaki, Yasuyuki Sakakibara
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AssigneeHamamatsu Photonics K.K.
InventorsDaiki Suzuki, Takuma Osaki, Yasuyuki Sakakibara
Estimating the term…
An actuator device includes a support part, a first movable part, a second movable part, a first connecting part, a second connecting part, a spiral coil provided to the second movable part, a magnetic field generator, a first external terminal provided to the support part; and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring formed in a shape of a layer, provided to the second movable part so as to straddle the coil, and connected to the inner end portion of the coil and the lead wiring. A thickness of the straddle wiring is smaller than a thickness of the coil. The straddle wiring is electrically insulated from the mirror surface.
An actuator device comprising:
Dependencies are inferred from the claim text.