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US 2023/0144201 A1Published application
Image pickup device and image generation method
AssigneeKioxia Corporation
InventorTakeshi Yamane
Life of this patent
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AssigneeKioxia Corporation
InventorTakeshi Yamane
Estimating the term…
An image pickup device includes a disk with an aperture formed with an aperture through which X-rays can transmit, a vacuum suction ring having an inner peripheral ring and an outer peripheral ring having different heights, and fixes a position of the aperture with respect to a subject. Further, the image pickup device includes a rotation stage that holds the subject and the disk with an aperture fixed by the vacuum suction ring, and can rotate at a desired angle about a rotation axis along a direction perpendicular to a surface of the subject, and a one-dimensional detector in which line-shaped pixels are disposed at a predetermined pixel pitch. Further, the image pickup device includes an imaging mirror that forms an image of X-rays transmitted through the subject and the aperture on the one-dimensional detector, and a control analysis unit that corrects coordinates of an image intensity profile detected by the one-dimensional detector, and reconstructs an image of the subject from the image intensity profile after the correction.
An image pickup device comprising:
An image generation method of irradiating a subject, which is fixedly placed at a predetermined distance from a sample holding plate, with imaging light, detecting imaging light transmitted through an aperture formed in the sample holding plate in the imaging light transmitted through the subject each time the subject is rotated, generating an image intensity profile for each rotation angle while rotating the subject by a predetermined angle, and reconstructing an image of the subject by using the image intensity profile, the image generation method comprising:
An image generation method of irradiating a subject, which is fixedly placed at a predetermined distance from a sample holding plate, with imaging light, detecting imaging light transmitted through an aperture formed in the sample holding plate in the imaging light transmitted through the subject each time the subject is rotated, and generating an image intensity profile for each rotation angle while rotating the subject by a predetermined angle, and reconstructing an image of the subject by using the image intensity profile, the image generation method comprising:
Dependencies are inferred from the claim text.