Transforming a Valve Metal Layer Into a Template Comprising a Plurality of Spaced (Nano)channels and Forming Spaced Structures Therein

A template comprising a plurality of spaced channels aligned longitudinally along a first direction, wherein the template is obtained by a method for transforming at least part of a valve metal layer into the template, the method comprising:

• a first anodization step comprising anodizing at least part of the valve metal layer in a thickness direction to form a porous layer of valve metal oxide comprising a plurality of channels, wherein each channel has channel walls aligned longitudinally along the first direction and has a channel bottom, and wherein the channel bottom is coated with a first insulating metal oxide barrier layer as a result of the first anodization step;
• a protective treatment, wherein the protective treatment induces hydrophobic surfaces to the channel walls and channel bottoms, and wherein the protective treatment comprises depositing a protective layer on the channel walls and on the channel bottoms;
• a second anodization step after the protective treatment, wherein the second anodization step comprises:
• removing the first insulating metal oxide barrier layer from the channel bottoms;
• removing the protective layer only from the channel bottoms;
• inducing anodization only at the bottoms of the plurality of channels;
• and
• creating a second insulating metal oxide barrier layer at the channel bottoms;
• and
• an etching step in an etching solution, wherein the etching step removes the second insulating metal oxide barrier layer from the channel bottoms, and wherein the channel walls maintain hydrophobic surfaces at a conclusion of the etching step.

A method for forming a plurality of spaced structures on a substrate, the method comprising:

• transforming at least part of a valve metal layer into a template comprising a plurality of spaced channels aligned longitudinally along a first direction to form the template and the substrate, wherein transforming at least part of the valve metal layer into the template comprises:
• a first anodization step comprising anodizing at least part of the valve metal layer in a thickness direction to form a porous layer of valve metal oxide comprising a plurality of channels, wherein each channel has channel walls aligned longitudinally along the first direction and has a channel bottom, and wherein the channel bottom is coated with a first insulating metal oxide barrier layer as a result of the first anodization step;
• a protective treatment, wherein the protective treatment induces hydrophobic surfaces to the channel walls and channel bottoms, and wherein the protective treatment comprises depositing a protective layer on the channel walls and on the channel bottoms;
• a second anodization step after the protective treatment, wherein the second anodization step comprises:
• removing the first insulating metal oxide barrier layer from the channel bottoms;
• removing the protective layer only from the channel bottoms;
• inducing anodization only at the bottoms of the plurality of channels;
• and
• creating a second insulating metal oxide barrier layer at the channel bottoms;
• and
• an etching step in an etching solution, wherein the etching step removes the second insulating metal oxide barrier layer from the channel bottoms, and wherein the channel walls maintain hydrophobic surfaces at a conclusion of the etching step;
• and
• depositing a solid functional material within the channels of the template to form the plurality of spaced structures inside the plurality of spaced channels, wherein the plurality of spaced structures are aligned longitudinally along the first direction.