Stability-enhanced organotin photoresist compositions
OwnerKai Jiang, Alan J. Telecky +1inventors
InventorsKai Jiang, Alan J. Telecky, Stephen T. Meyers
Life of this patent
Estimating the term…
Loading patent…
OwnerKai Jiang, Alan J. Telecky +1inventors
InventorsKai Jiang, Alan J. Telecky, Stephen T. Meyers
Estimating the term…
An organotin precursor solution is described comprising an organic solvent, an optional additive, and an organotin composition represented by one or more organotin compounds represented by the formula RSnL3, wherein each R is independently a hydrocarbyl ligand having from 1 to 31 carbon atoms and each L is independently a hydrolysable ligand, wherein the total concentration of Sn is from about 0.001 M to about 0.5 M. The solvent can comprises a linear alcohol with from 1 to 6 carbon atoms, and the organotin precursor solution can have an initial water content from about 100 ppm to about 10,000 ppm, in which the organotin precursor solution has a reduced rate of water dissipation relative to an equivalent organotin precursor solution formed with 4-methyl-2-pentanol. The organotin precursor solutions can be prepared through the selection of an appropriate stabilizing compound, which can be a linear, short chain alcohol and an appropriate additive.
An organotin precursor solution comprising an organic solvent and an organotin composition represented by one or more organotin compounds represented by the formula RSnL3, wherein each R is independently a hydrocarbyl ligand having from 1 to 31 carbon atoms and each L is independently a hydrolysable ligand, wherein the total concentration of Sn is from about 0.001M to about 0.5 M, wherein the solvent comprises a linear alcohol with from 1 to 6 carbon atoms, wherein the organotin precursor solution has an initial water content from about 100 ppm to about 10,000 ppm and wherein the organotin precursor solution has a reduced rate of water dissipation relative to an equivalent organotin precursor solution formed with 4-methyl-2-pentanol.
Dependencies are inferred from the claim text.