Laser machining device and laser machining method
AssigneeHamamatsu Photonics K.K.
InventorsTakashi KURITA, Yuu TAKIGUCHI
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Abstract
A laser processing apparatus includes a spatial light modulator for inputting laser light output from a laser light source and outputting laser light after phase modulation by a hologram, and a control unit for presenting, on the spatial light modulator, the hologram for focusing the laser light after the phase modulation output from the spatial light modulator on a plurality of irradiation points in a processing object by a focusing optical system. The control unit controls light intensities of at least two irradiation points included in the plurality of irradiation points independently of each other.
Claims12
A laser processing apparatus comprising:
- a spatial light modulator configured to input laser light output from a laser light source, present a hologram for modulating a phase of the laser light in each of a plurality of pixels arranged two-dimensionally, and output laser light after phase modulation by the hologram;
- a focusing optical system provided at a subsequent stage of the spatial light modulator;
- and
- a control unit configured to present, on the spatial light modulator, the hologram for focusing the laser light after the phase modulation output from the spatial light modulator on a plurality of irradiation points in a processing object by the focusing optical system, wherein
- the control unit is configured to control light intensities of at least two irradiation points included in the plurality of irradiation points independently of each other.
A laser processing method repeatedly performing:
- performing a control of presenting, on a spatial light modulator, a hologram for modulating a phase of light in each of a plurality of pixels arranged two-dimensionally;
- performing a light modulation of inputting laser light output from a laser light source to the spatial light modulator, and performing phase modulation of the laser light by the hologram;
- and
- performing a focusing of focusing the laser light after the phase modulation, wherein
- in the control, the spatial light modulator presents the hologram for focusing the laser light after the phase modulation output from the spatial light modulator on a plurality of irradiation points in a processing object by the focusing, and light intensities of at least two irradiation points included in the plurality of irradiation points are controlled independently of each other.
Dependencies are inferred from the claim text.