# US 2023/0143365 A1 · Memory device and method for calibrating the device and fabricating the device

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- Number: US 2023/0143365 A1
- Document ID: US20230143365A1
- Status: Published application
- Kind: A1
- Application number: 17/852,664
- Filed: 2022-06-29
- Published: 2023-05-11
- Earliest claimed: 2021-11-05
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Joo Hwan KIM; Jun Young PARK; Jin Do BYUN; Kwang Seob SHIN; Eun Seok SHIN; Hyun-Yoon CHO; Young Don CHOI; Jung Hwan CHOI
- Web page: https://patentgrep.com/patent/US20230143365A1

## CPC

- G11C 7/1048: {Data bus control circuits, e.g. precharging, presetting, equalising}
- G11C 7/1057: {Data output buffers, e.g. comprising level conversion circuits, circuits for adapting load}
- G11C 11/4093: Input/output [I/O] data interface arrangements, e.g. data buffers
- G11C 29/022: {in I/O circuitry}
- G11C 29/028: {with adaption or trimming of parameters}
- G11C 29/50008: {of impedance}
- G11C 7/1084: {Data input buffers, e.g. comprising level conversion circuits, circuits for adapting load}
- G11C 2029/5002: {Characteristic}
- G11C 2207/2254: Calibration
- H03K 19/0005: {Modifications of input or output impedance}
- G11C: STATIC STORES (semiconductor memory devices H10B)
- H03K: PULSE TECHNIQUE (measuring pulse characteristics G01R; modulating sinusoidal oscillations with pulses H03C; transmission of digital information H04L; discriminator circuits detecting phase difference between two signals by counting or integrating cycles of oscillation H03D3/04; automatic control, starting, synchronisation or stabilisation of generators of electronic oscillations or pulses where the type of generator is irrelevant or unspecified H03L; coding, decoding or code conversion, in general H03M)

## Abstract

A method includes measuring a linearity of a first pull-up circuit, a second pull-up circuit, a third pull-up circuit, a first pull-down circuit, a second pull-down circuit and a third pull-down circuit using an initial pull-up code and an initial pull-down code, each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit having a respective resistance value determined based on a respective pull-up code, and each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit having a respective resistance value determined based on a respective pull-down code, and determining a calibration setting indicator based on the measurement result, the calibration setting indicator indicating a calibration method of a transmission driver including the first pull-up circuit, the second pull-up circuit, the third pull-up circuit, the first pull-down circuit, the second pull-down circuit and the third pull-down circuit.

## Claims

### Claim 1

A method for calibrating a memory device, comprising:
measuring a linearity of a first pull-up circuit, a second pull-up circuit, a third pull-up circuit, a first pull-down circuit, a second pull-down circuit and a third pull-down circuit using an initial pull-up code and an initial pull-down code to obtain a measurement result, each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit having a respective resistance value determined based on a respective pull-up code, and each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit having a respective resistance value determined based on a respective pull-down code; and
determining a calibration setting indicator based on the measurement result, the calibration setting indicator indicating a calibration method of a transmission driver including the first pull-up circuit, the second pull-up circuit, the third pull-up circuit, the first pull-down circuit, the second pull-down circuit and the third pull-down circuit.

### Claim 2 (depends on 1)

The method of claim 1, wherein the measuring the linearity comprises:
measuring a plurality of resistance values of the first pull-up circuit, the second pull-up circuit, the third pull-up circuit, the first pull-down circuit, the second pull-down circuit and the third pull-down circuit while applying a plurality of voltage levels to the transmission driver.

### Claim 3 (depends on 2)

The method of claim 2, wherein
the plurality of resistance values includes a first resistance value of the first pull-up circuit measured while applying the plurality of voltage levels to the transmission driver; and
the measuring the linearity comprises:
determining that the first pull-up circuit is linear in response to the first resistance value being within an error range; and
determining that the first pull-up circuit is non-linear in response to the first resistance value being outside of the error range.

### Claim 4 (depends on 1)

The method of claim 1, wherein the determining the calibration setting indicator comprises determining a test mode register set (TMRS) value.

### Claim 5 (depends on 4)

The method of claim 4, further comprising:
performing fusing based on the TMRS value.

### Claim 6 (depends on 1)

The method of claim 1, wherein the calibration method is a ZQ calibration method.

### Claim 7 (depends on 1)

The method of claim 1, further comprising:
determining the respective pull-up code of each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit based on the calibration setting indicator; and
determining the respective pull-down code of each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit based on the calibration setting indicator.

### Claim 8 (depends on 7)

The method of claim 7, wherein
the determining the respective pull-up code includes determining the respective pull-up code of each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit to be set to the initial pull-up code in response to the calibration setting indicator having a first value; and
the determining the respective pull-down code includes determining the respective pull-down code of each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit to be set to the initial pull-down code in response to the calibration setting indicator having the first value.

### Claim 9 (depends on 8)

The method of claim 8, wherein
the determining the respective pull-up code includes determining the respective pull-up code of each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit by executing a plurality of first search loops in response to the calibration setting indicator having a second value; and
the determining the respective pull-down code includes determining the respective pull-down code of each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit to be set to the initial pull-down code in response to the calibration setting indicator having the second value.

### Claim 10 (depends on 9)

The method of claim 9, wherein
the determining the respective pull-up code includes determining the respective pull-up code of each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit to be set to the initial pull-up code in response to the calibration setting indicator having a third value; and
the determining the respective pull-down code includes determining the respective pull-down code of each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit by executing a plurality of second search loops in response to the calibration setting indicator having the third value.

### Claim 11 (depends on 10)

The method of claim 10, wherein
the determining the respective pull-up code includes determining the respective pull-up code of each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit by executing the plurality of first search loops in response to the calibration setting indicator having a fourth value; and
the determining the respective pull-down code includes determining the respective pull-down code of each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit by executing the plurality of second search loops in response to the calibration setting indicator having the fourth value.

### Claim 12

A method for fabricating a memory device, comprising:
measuring a linearity of a first pull-up circuit, a second pull-up circuit, a third pull-up circuit, a first pull-down circuit, a second pull-down circuit and a third pull-down circuit to obtain a measurement result, each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit having a respective resistance value determined based on a respective pull-up code, and each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit having a respective resistance value determined based on a respective pull-down code;
determining a calibration method of a transmission driver based on the measurement result, the transmission driver including the first pull-up circuit, the second pull-up circuit, the third pull-up circuit, the first pull-down circuit, the second pull-down circuit and the third pull-down circuit;
determining the respective pull-up code of each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit based on the calibration method; and
determining the respective pull-down code of each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit based on the calibration method.

### Claim 13 (depends on 12)

The method of claim 12, wherein
the transmission driver is included in a memory chip; and
the memory chip is on a wafer during the measuring the linearity.

### Claim 14 (depends on 13)

The method of claim 13, wherein the determining the respective pull-up code and the determining the respective pull-down code are performed in a process of packaging the memory chip.

### Claim 15 (depends on 12)

The method of claim 12, wherein
the measuring the linearity comprises measuring the linearity of the first pull-up circuit, the second pull-up circuit, the third pull-up circuit, the first pull-down circuit, the second pull-down circuit and the third pull-down circuit using an initial pull-up code and an initial pull-down code; and
the determining the respective pull-up code and the determining the respective pull-down code are performed using the initial pull-up code and the initial pull-down code.

### Claim 16 (depends on 12)

The method of claim 12, wherein the measuring the linearity comprises:
measuring a plurality of resistance values of the first pull-up circuit, the second pull-up circuit, the third pull-up circuit, the first pull-down circuit, the second pull-down circuit and the third pull-down circuit while applying a plurality of voltage levels to the transmission driver.

### Claim 17

A memory device comprising:
a transmission driver configured to output a multi-level signal; and
a memory storing a calibration setting indicator,
wherein the transmission driver comprises:
a first pull-up circuit, a second pull-up circuit and a third pull-up circuit, each of the first pull-up circuit, the second pull-up circuit and the third pull-up circuit having a respective resistance value determined based on a respective pull-up code, and
a first pull-down circuit, a second pull-down circuit and a third pull-down circuit, each of the first pull-down circuit, the second pull-down circuit and the third pull-down circuit having a respective resistance value determined based on a respective pull-down code,
wherein the calibration setting indicator indicates a method of setting the respective pull-up code and the respective pull-down code.

### Claim 18 (depends on 17)

The memory device of claim 17, wherein the calibration setting indicator indicates a ZQ calibration method of the transmission driver.

### Claim 19 (depends on 17)

The memory device of claim 17, wherein the calibration setting indicator stores information as a test mode register set (TMRS).

### Claim 20 (depends on 19)

The memory device of claim 19, wherein the calibration setting indicator comprises a fused fuse.
