Plasma generator
AssigneeEmd Corporation
InventorAkinori EBE
Life of this patent
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Abstract
A plasma generator includes an AC power supply, a power supply electrode and a ground electrode, one of which is disposed in a gas flow path and the other of which is a conductive wall constituting the gas flow path, an inflexible connection member configured to electrically connect the AC power supply and the power supply electrode, and an insulating material (power supply side insulating material, ground side insulating material) covering a side of one of the power supply electrode and the ground electrode, the side facing the other electrode.
Claims8
A plasma generator provided in a gas treatment apparatus for generating plasma by ionizing gas flowing in a gas flow path, the plasma generator comprising:
- an AC power supply;
- a power supply electrode and a ground electrode, one of which is disposed in the gas flow path and the other of which is a conductive wall constituting the gas flow path;
- an inflexible connection member configured to electrically connect the AC power supply and the power supply electrode;
- and
- an insulating material covering a side of one of the power supply electrode and the ground electrode, the side facing the other electrode.
Dependencies are inferred from the claim text.