Preventive Maintenance Method for Chamber of Metal Etching Machine
AssigneeShanghai Huali Microelectronics Corporation
InventorsMinjie Chen, Jin Xu, Zaifeng Tang, Yu Ren
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Abstract
The present application discloses a preventive maintenance method for a chamber of a metal etching machine. An optimized burning cleaning recipe is added before the chamber is opened, and metal substances remaining on the surface of an electrostatic chuck are removed by adopting a cleaning/pumping down multi-step alternate method. Before the chamber is opened for preventive maintenance, the phenomenon of metal particles remaining on the surface of the electrostatic chuck can be significantly improved, thus solving the downtime problem caused by abnormal backside helium and ensuring the stability of mass production.
Claims8
A preventive maintenance method for a chamber of a metal etching machine, wherein the preventive maintenance method for the chamber of the metal etching machine comprises the following steps:
- S0:
- the chamber of the metal etching machine entering mean time between cleans;
- S1:
- before the chamber of the metal etching machine is opened, cleaning an electrostatic chuck in the chamber and a chamber wall by using an O2 burning cleaning method;
- S2:
- exhausting and pumping down the chamber;
- S3:
- cleaning the electrostatic chuck in the chamber and the chamber wall by using an NF3/Cl2 burning cleaning method;
- S4:
- exhausting and pumping down the chamber;
- and
- S5:
- opening the chamber of the metal etching machine for preventative maintenance.
Dependencies are inferred from the claim text.