Processing apparatus
AssigneeNikon Corporation
InventorHiroyuki NAGASAKA
Life of this patent
Estimating the term…
Abstract
A processing apparatus is a processing apparatus that processes an object by a processing light from a processing light source, includes a first optical system that condenses the processing light from the processing light source on a condensed plane; and a second optical system that condenses the processing light from the first optical system to irradiate the object with it, a position in the condensed plane through which the processing light passes is changeable, a propagating direction of the processing light propagating from the first optical system to the second optical system changes depending on the position in the condensed plane through which the processing light passes.
Claims20
1-99. (canceled)
A processing apparatus that is configured to process an object, which has a first surface and a second surface facing the first surface, by a processing light from a processing light source, wherein
- the processing apparatus comprises:
- an objective optical system that is disposed to be located between the first surface and the second surface and that is configured to irradiate at least one of the first surface and the second surface with the processing light;
- and
- a movable optical member that is disposed on an processing optical path that is at the processing light source side from a position between the first surface and the second surface,
- an irradiation position of the processing light on at least one of the first surface and the second surface is changed by moving the movable optical member.
A processing method of processing an object, which has a first surface and a second surface facing the first surface, by a processing light from a processing light source, wherein
- the processing method comprises:
- irradiating at least one of the first surface and the second surface with the processing light from an objective optical system that is disposed to be located between the first surface and the second surface;
- and
- changing an irradiation position of the processing light on at least one of the first surface and the second surface by moving a movable optical member that is disposed on an processing optical path that is at the processing light source side from a position between the first surface and the second surface.
Dependencies are inferred from the claim text.