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US 2023/0142870 A1Published application
Electrostatic chuck
AssigneeShinko Electric Industries Co., Ltd.
InventorsKeita Sato, Yohei Yamada
Life of this patent
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Abstract
An electrostatic chuck includes a base plate, a ceramic plate fixed to the base plate and including an electrode embedded in the ceramic plate, and a resin layer bonding the base plate and the ceramic plate and including one or more adhesives. In at least one of the one or more adhesives, a temperature corresponding to an extreme value of a loss tangent in a temperature range of −150° C. to 250° C. is −70° C. or lower.
Claims6
An electrostatic chuck comprising:
- a base plate;
- a ceramic plate fixed to the base plate and including an electrode embedded in the ceramic plate;
- and
- a resin layer bonding the base plate and the ceramic plate and including one or more adhesives,
- wherein in at least one of the one or more adhesives, a temperature corresponding to an extreme value of a loss tangent in a temperature range of −150° C. to 250° C. is −70° C. or lower.
2 more elements
Dependencies are inferred from the claim text.