Inorganic solid object pattern manufacturing method and inorganic solid object pattern
AssigneeToray Industries, Inc.
InventorsMasao Kamogawa, Mitsuhito Suwa, Makoto Hayasaka
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Abstract
A method of producing an inorganic solid pattern is described that includes: a step of coating an inorganic solid with a composition containing a polymetalloxane and an organic solvent; a step of heating the coating film obtained in the coating step, at a temperature of 100° C. or more and 1000° C. or less to form a heat-treated film; a step of forming a pattern of the heat-treated film; and a step of patterning the inorganic solid by etching using the pattern of the heat-treated film as a mask.
Claims16
A method of producing an inorganic solid pattern, comprising:
- a coating step of coating an inorganic solid with a composition containing a polymetalloxane and an organic solvent;
- a step of heating a coating film obtained in said coating step, at a temperature of 100° C. or more and 1000° C. or less to form said coating film into a heat-treated film;
- a step of forming a pattern of said heat-treated film;
- and
- a step of patterning said inorganic solid by etching using said pattern of said heat-treated film as a mask.
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Dependencies are inferred from the claim text.