Storage Cassette for Replaceable Parts for Plasma Processing Apparatus
AssigneesBeijing E-Town Semiconductor Technology Co., Ltd., Mattson Technology, Inc.
InventorsKin Pong Lo, Peter J. Lembesis
Life of this patent
Estimating the term…
Abstract
A cassette for a workpiece processing system is provided. The cassette is configured to hold one or more replaceable parts, one or more workpieces and one or more pedestal protectors. The cassette includes a divider configured to separate the one or more replacement parts from the one or more workpieces and/or one or more pedestal protectors. The cassette is configured to be disposed in a storage chamber of a workpiece processing apparatus to facilitate automated replacement of replacement parts in one or more processing chambers. Workpiece processing systems and methods of replacing replacement parts in a workpiece processing system are also provided.
Claims20
A storage cassette for a workpiece processing system, comprising:
- a cassette configured to hold one or more replaceable parts, one or more workpieces and one or more pedestal protectors, the cassette further comprising a divider configured to separate the one or more replacement parts from the one or more workpieces or one or more pedestal protectors, wherein the cassette is configured to be disposed in a storage chamber of a workpiece processing apparatus to facilitate automated replacement of replacement parts in one or more processing chambers.
A workpiece processing system having a storage chamber and one or more processing chambers for processing workpieces, the workpiece processing system comprising:
- a storage chamber;
- one or more processing chambers for processing workpieces;
- a transfer chamber operably coupled to the storage chamber and the one or more processing chambers;
- and
- a cassette disposed in the storage chamber, the cassette configured to hold one or more replacement parts, one or more workpieces and one or more pedestal protectors, the cassette comprising a divider configured to separate the one or more replacement parts from the one or more workpieces or one or more pedestal protectors.
Dependencies are inferred from the claim text.