Lighting Optical System and Substrate Inspecting Device

Abstract

This illumination optical system comprises a laser light source 301, 401, 501, a light collection optical system 311, 411, 511, and a support structure 312, 412 that is able to secure the laser light source and the light collection optical system, wherein the light from the laser light source is focused onto an object to be inspected 307, 407, 507. The light collection optical system comprises a cylindrical mirror 306, 406, 506, and at least one cylindrical lens 304, 404a, 404b, 404c, 504a, 504b, 504c. The cylindrical mirror is an optical element that collects light in a first direction, and the cylindrical lens is an optical element that collects light in a second direction perpendicular to the first direction. The focal distance of the cylindrical lens to the object to be inspected is greater than the focal distance of the cylindrical mirror to the object to be inspected.

Dependencies are inferred from the claim text.