Substrate-accommodating container
AssigneeMiraial Co., Ltd.
InventorChiaki Matsutori
Life of this patent
Estimating the term…
Abstract
The container main body includes a tubular wall portion having an opening circumferential portion provided at one end portion and the other end portion being closed, the opening circumferential portion having a container main body opening portion formed therein. The substrate storing space can store a substrate and communicates with the container main body opening portion. A central fixed member is provided to the wall portion of the container main body so as to be removably attached to the wall portion of the container main body. The central fixed member is configured to be locked and fixed to an alignment portion provided at a load port for conveying the substrate stored in the substrate storing space to a processing apparatus.
Claims6
A substrate storing container, comprising:
- a container main body including a tubular wall portion having an opening circumferential portion provided at one end portion and the other end portion being closed, the opening circumferential portion having a container main body opening portion formed therein, and a substrate storing space formed by an inner face of the wall portion, the substrate storing space being capable of storing a substrate and communicating with the container main body opening portion;
- a lid body that can be removably attached to the opening circumferential portion and that can close the container main body opening portion by being in a positional relationship in which the lid body is surrounded by the opening circumferential portion;
- and
- a sealing member that is attached to the lid body and can abut with the lid body and the opening circumferential portion, the sealing member being configured to close the container main body opening portion in cooperation with the lid body by being interposed between the opening circumferential portion and the lid body so as to tightly abut with the opening circumferential portion and the lid body,
- wherein the wall portion includes a back wall, an upper wall, a lower wall, and a pair of side walls;
- the back wall closes the other end portion of the wall portion;
- and one end portion of the upper wall, one end portion of the lower wall, and one end portions of the side walls form the container main body opening portion, and
- wherein a central fixed member is provided to the wall portion of the container main body so as to be removably attached to a central portion of the lower wall of the wall portion of the container main body, the central fixed member being configured to be locked and fixed to an alignment portion provided at a load port for conveying the substrate stored in the substrate storing space to a processing apparatus.
Dependencies are inferred from the claim text.